A state-owned enterprise has started mass production of DUV lithography machine manufacturing equipment independently developed by Changxin Storage or become one of the first customers

On July 27, according to TheInformation quoted people familiar with the matter, a state-owned enterprise in Shanghai has begun mass production of independently developed DUV (deep ultraviolet) lithography machine manufacturing equipment. This is an important progress in promoting localized substitution in China's semiconductor industry. It is reported that the company plans to produce about 5 DUV lithography machines in 2026 and expand to about 20 in 2027. Although there is still a gap with the production capacity of Dutch lithography giant ASML (ASML delivered 131 sets of immersion DUV lithography systems last year), the breakthrough in mass production of domestic DUV equipment means that China's chip manufacturing supply chain is further moving towards autonomy and controllability. Sources said that the domestic DUV lithography machines are planned to be delivered to major chip manufacturers in China, including SMIC, Huahong Semiconductor and memory chip manufacturer Changxin Storage. Among them, Changxin Storage, as a representative enterprise in China's DRAM industry, is expected to become an important user of domestic advanced semiconductor manufacturing equipment. If domestic DUV equipment can achieve stable operation in the production lines of Changxin Storage and other manufacturers, it will further reduce the dependence of China's memory chip industry on overseas key equipment. As of the publication, Yudu Semiconductor, SMIC, Huahong and Changxin Xingchu had not responded to comments.